Magnetron configurations dependent surface properties of SnO2 thin films deposited by sputtering process
Amit Kumar Gangwar, Rahul Godiwal, Jyoti Jaiswal, Vishal Baloria, Prabir Pal, Govind Gupta, Preetam Singh
Topics & Concepts
X-ray photoelectron spectroscopyThin filmSputter depositionMaterials scienceCavity magnetronSputteringAnalytical Chemistry (journal)Scanning electron microscopeChemistryChemical engineeringNanotechnologyComposite materialChromatographyEngineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator Technologies