Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding
Yu Zhang, Renke Kang, Jiawei Ren, Hongye Lang, Shang Gao
Topics & Concepts
Materials scienceGrindingMetallurgySiliconComposite materialSurface (topology)GeometryMathematicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research