Effect of duty cycle on microstructure and mechanical properties of AlCrN coatings deposited by HiPIMS
Yuan Liu, Ji Cheng Ding, Bao Rong Zhang, Jianjun Chen, Chang Ren Tang, Rui Yuan Zhu, Jun Zheng
Topics & Concepts
High-power impulse magnetron sputteringDuty cycleMaterials scienceMicrostructureCoatingMetallurgyGrain sizeComposite materialSputter depositionSputteringThin filmPower (physics)NanotechnologyThermodynamicsPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials