Pulse length selection in bipolar HiPIMS for high deposition rate of smooth, hard amorphous carbon films
Rajesh Ganesan, Iván Fernández-Martínez, Behnam Akhavan, D.T.A. Matthews, D. Sergachev, Michael Stueber, David R. McKenzie, Marcela Bilek
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceAmorphous solidAmorphous carbonSputteringArgonSputter depositionAnalytical Chemistry (journal)Carbon filmIonResidual stressCarbon fibersComposite materialThin filmNanotechnologyAtomic physicsCrystallographyChemistryOrganic chemistryChromatographyPhysicsComposite numberDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices