Study of molecular layer deposition of zinc-based hybrid film as photoresist
Yiyang Shan, Xingkun Wang, Xu Zheng, Xiang Zhao, Ze Feng, Weihua Wang, Yahui Cheng, Hui Liu, Kui Tan, Feng Luo, Hong Dong
Topics & Concepts
PhotoresistLayer (electronics)Deposition (geology)ZincMaterials scienceNanotechnologyChemical engineeringMetallurgyEngineeringGeologySedimentPaleontologyAdvancements in Photolithography TechniquesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis