A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique
Anurag Roy, Shengxi Wang, K. Komvopoulos
2023Journal of materials research/Pratt's guide to venture capital sources22 citationsDOIOpen Access PDF
Topics & Concepts
Materials scienceThin filmNanotechnologyCarbon filmMiniaturizationDeposition (geology)NanometreAmorphous carbonAmorphous solidVacuum arcCarbon fibersCathodic protectionEngineering physicsPlasmaComposite materialEngineeringChemistryElectrodeComposite numberPhysicsOrganic chemistryQuantum mechanicsElectrochemistryPhysical chemistrySedimentBiologyPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices