Low-temperature MoS2 growth on CMOS wafers
Max C. Lemme, Alwin Daus
Topics & Concepts
Molybdenum disulfideWaferCMOSMaterials scienceTransistorSemiconductorOptoelectronicsSiliconNanotechnologyIntegrated circuitElectronic circuitField-effect transistorMolybdenumElectrical engineeringMetallurgyEngineeringVoltage2D Materials and ApplicationsMXene and MAX Phase MaterialsAdvanced Memory and Neural Computing