The reduction of FIB damage on cryo-lamella by lowering energy of ion beam revealed by a quantitative analysis
Qi Yang, Chunling Wu, Dongjie Zhu, Junxi Li, Jing Cheng, Xinzheng Zhang
Topics & Concepts
Focused ion beamMaterials scienceLamella (surface anatomy)PolishingElectron microscopeIcosahedral symmetryIon beamCryo-electron microscopyResolution (logic)Transmission electron microscopyMicroscopyIonBeam (structure)NanotechnologyOpticsCrystallographyComposite materialBiophysicsChemistryOrganic chemistryComputer sciencePhysicsArtificial intelligenceBiologyAdvanced Electron Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy Techniques