Atomic Layer Deposition of Indium‐Tin‐Oxide as Multifunctional Coatings on V<sub>2</sub>O<sub>5</sub> Thin‐Film Model Electrode for Lithium‐Ion Batteries
Bo Zhao, Mikko Nisula, Arpan Dhara, Lowie Henderick, Felix Mattelaer, Jolien Dendooven, Christophe Detavernier
Abstract
Abstract This work demonstrates the possible usages of indium tin oxide (ITO) thin‐films as multifunctional coatings on V 2 O 5 model electrodes for lithium‐ion batteries (LIBs). The thin films are produced with the atomic layer deposition (ALD) method via adjusting the ratio of In 2 O 3 and SnO 2 sub‐layers to a well‐controlled In: Sn contents. The highest conductivity value (7.37 × 10 −4 Ω cm) of as‐grown ITO film is obtained from the sample containing 5% SnO 2 of overall ALD cycles. The ITO thin‐films are further investigated as multifunctional coatings on ALD V 2 O 5 electrodes for LIBs: At first, dual electronic and ionic conductive protecting properties of ITO layer are explored to attenuate the fading of the battery capacity by improving the cycling stability. Second, the feasibility of ITO layer as a dual functioning current collector‐cum‐protective coating layer is demonstrated. Third, ITO layer is investigated as a current collector and display performance comparable to that of Pt as current collector of traditional thin‐film LIBs. The electronic and electrochemical properties of ITO provide the opportunity to use ITO as a multifunctional coating for (3D) thin‐film LIBs and can find potential usages in miniaturized electronic devices.