Litcius/Paper detail

In-situ temperature-dependent characterization of copper through glass via (TGV)

Ke Pan, Jiefeng Xu, Yangyang Lai, Seungbae Park, Chukwudi Okoro, Dhananjay Joshi, Scott Pollard

2022Microelectronics Reliability30 citationsDOI

Topics & Concepts

Materials scienceCopperInterposerCreepComposite materialTemperature cyclingDeformation (meteorology)Stress (linguistics)ThermalMetallurgyLayer (electronics)ThermodynamicsLinguisticsEtching (microfabrication)PhysicsPhilosophy3D IC and TSV technologiesElectronic Packaging and Soldering TechnologiesAdditive Manufacturing and 3D Printing Technologies