Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors
Alessandro Nastro, Marco Ferrari, Vittorio Ferrari
Topics & Concepts
ActuatorCapacitive sensingSensitivity (control systems)Microelectromechanical systemsPosition (finance)Control theory (sociology)Position sensorStiffnessParametric statisticsMechanism (biology)RepeatabilityMechanical impedanceAcousticsElectrical impedanceMaterials sciencePhysicsEngineeringElectronic engineeringComputer scienceElectrical engineeringStructural engineeringOptoelectronicsAngular displacementMathematicsArtificial intelligenceStatisticsControl (management)EconomicsQuantum mechanicsFinanceAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications