Mode-localized accelerometer with ultrahigh sensitivity
Hao Kang, Bing Ruan, Yongcun Hao, Honglong Chang
Topics & Concepts
AccelerometerSensitivity (control systems)Microelectromechanical systemsResonatorNoise (video)AcousticsMode (computer interface)Noise floorMaterials scienceVibrationFabricationOptoelectronicsPhysicsElectronic engineeringComputer scienceEngineeringNoise measurementNoise reductionAlternative medicineOperating systemMedicineQuantum mechanicsArtificial intelligencePathologyImage (mathematics)Mechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies