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Deep-learning-based fringe-pattern analysis with uncertainty estimation

Shijie Feng, Chao Zuo, Yan Hu, Yixuan Li, Qian Chen

2021Optica105 citationsDOIOpen Access PDF

Abstract

Deep learning has gained increasing attention in the field of optical metrology and demonstrated great potential in solving a variety of optical metrology tasks, such as fringe analysis and phase unwrapping. However, deep neural networks cannot always produce a provably correct solution, and the prediction error cannot be easily detected and evaluated unless the ground-truth is available. This issue is critical for optical metrology, as the reliability and repeatability of the measurement are of major importance for high-stakes scenarios. In this paper, for the first time to our knowledge, we demonstrate that a Bayesian convolutional neural network (BNN) can be trained to not only retrieve the phase from a single fringe pattern but also produce uncertainty maps depicting the pixel-wise confidence measure of the estimated phase. Experimental results show that the proposed BNN can quantify the reliability of phase predictions under conditions of various training dataset sizes and never-before-experienced inputs. Our work allows for making better decisions in deep learning solutions, paving a new way to reliable and practical learning-based optical metrology.

Topics & Concepts

MetrologyComputer scienceConvolutional neural networkDeep learningReliability (semiconductor)Artificial intelligenceArtificial neural networkMachine learningMeasure (data warehouse)Ground truthRepeatabilityBayesian probabilityPixelPhase (matter)Pattern recognition (psychology)Data miningOpticsStatisticsMathematicsPhysicsQuantum mechanicsPower (physics)Optical measurement and interference techniquesImage Processing Techniques and ApplicationsAdvanced Measurement and Metrology Techniques
Deep-learning-based fringe-pattern analysis with uncertainty estimation | Litcius