Depolarization of surface scattering in polarized laser scattering detection for machined silicon wafers
Jingfei Yin, Qian Bai, Han Haitjema, Bi Zhang
Topics & Concepts
ScatteringWaferMaterials scienceSurface roughnessOpticsLight scatteringMachiningOptoelectronicsPhysicsComposite materialMetallurgySurface Roughness and Optical MeasurementsAdvanced Surface Polishing TechniquesLaser Material Processing Techniques