Low MOCVD growth temperature controlled phase transition of Ga2O3 films for ultraviolet sensing
Jianying Yue, Xueqiang Ji, Xiaohui Qi, Shan Li, Zuyong Yan, Zeng Liu, Peigang Li, Zhenping Wu, Yufeng Guo, Weihua Tang
Topics & Concepts
Metalorganic vapour phase epitaxyUltravioletMaterials sciencePhase transitionPhase (matter)OptoelectronicsAnalytical Chemistry (journal)ChemistryNanotechnologyEpitaxyCondensed matter physicsEnvironmental chemistryPhysicsOrganic chemistryLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors