Integrated piezoresistive sensor for high-precision closed-loop control of piezoelectric MEMS fast steering mirror
Zhichao Weng, Wenli Xue, Xingwang Zhu, Mingkun Wang, Yongquan Su, Yi Yang, Yichen Liu, Hao Huang, Yanlong Wang, Ke Xie, Yang Wang, Hao Chen, Lihao Wang, Zhenyu Wu, Hao Chen, Lihao Wang, Zhenyu Wu
Topics & Concepts
Microelectromechanical systemsPiezoresistive effectPiezoelectricityClosed loopLoop (graph theory)Piezoelectric sensorFeedback controlMaterials scienceControl theory (sociology)EngineeringAcousticsComputer scienceControl (management)Control engineeringPhysicsOptoelectronicsMathematicsArtificial intelligenceCombinatoricsAdvanced MEMS and NEMS TechnologiesSensor Technology and Measurement SystemsAdvanced Sensor Technologies Research