Effects of different partition depths on heat and oxygen transport during continuous Czochralski (CCz) silicon crystal growth
Thi-Hoai-Thu Nguyen, Jyh-Chen Chen, Shih-Chi Lo
Topics & Concepts
Partition coefficientSiliconPartition (number theory)QuartzOxygenCrystal growthMaterials scienceAnalytical Chemistry (journal)Crystal (programming language)MineralogyChemistryCrystallographyComposite materialMetallurgyChromatographyMathematicsCombinatoricsOrganic chemistryProgramming languageComputer scienceSolidification and crystal growth phenomenaFluid Dynamics and Thin FilmsPhase Change Materials Research