Probing the Melting Transitions in Phase-Change Superlattices via Thin Film Nanocalorimetry
Jie Zhao, Asir Intisar Khan, Mikhail Y. Efremov, Zichao Ye, Xiangjin Wu, Kangsik Kim, Zonghoon Lee, H.‐S. Philip Wong, Eric Pop, L. H. Allen
Abstract
Phase-change superlattices with nanometer thin sublayers are promising for low-power phase-change memory (PCM) on rigid and flexible platforms. However, the thermodynamics of the phase transition in such nanoscale superlattices remain unexplored, especially at ultrafast scanning rates, which is crucial for our fundamental understanding of superlattice-based PCM. Here, we probe the phase transition of Sb 2 Te 3 (ST)/Ge 2 Sb 2 Te 5 (GST) superlattices using nanocalorimetry with a monolayer sensitivity (∼1 Å) and a fast scanning rate (10 5 K/s). For a 2/1.8 nm/nm Sb 2 Te 3 /GST superlattice, we observe an endothermic melting transition with an ∼240 °C decrease in temperature and an ∼8-fold decrease in enthalpy compared to those for the melting of GST, providing key thermodynamic insights into the low-power switching of superlattice-based PCM. Nanocalorimetry measurements for Sb 2 Te 3 alone demonstrate an intrinsic premelting similar to the unique phase transition of superlattices, thus revealing a critical role of the Sb 2 Te 3 sublayer within our superlattices. These results advance our understanding of superlattices for energy-efficient data storage and computing.