3D-printed silica glass micro-mechanical device (MMD) for in situ mechanical testing
Ziyong Li, Yanwen Jia, Fang Su, Juzheng Chen, Xiewen Wen, Wenjun Liang, Hao Wu, Yang Lü
Abstract
Micro-electro-mechanical systems (MEMS)-based devices offers a premium solution for versatile in situ micro-/nano- mechanical characterizations of low-dimensional materials, however, they are primarily manufactured using costly top-down silicon photolithography microfabrication processes. Previously, we demonstrated that high-resolution bottom-up 3D printing technologies can be used for printing such micro-mechanical device (MMD), but those photopolymer-based devices are of low-modulus and less stable for long-term use. Here, based on our recently developed high-resolution glass 3D printing technique, we show that silica glass MMD with high definition and performance. The versatility of high-resolution additive manufacturing, combined with the long-term mechanical stability as well as exceptional mechanical properties of high-performance glass, enables the fabrication of MMDs with more desirable characteristics. This facilitates the in-situ micro-/nano- mechanical characterizations on novel materials. The tensile behaviors of microfibers and nanofilms, as demonstrated by our developed MMDs, showcase the potential for a groundbreaking approach to in situ micro-/nano- mechanical testing through the integration of 3D printing, high-performance glass, and MEMS technologies.