Correlation between crystallization and oxidation process of ScN films exposed to air
Joris More-Chevalier, Stanislav Cichoň, Lukáš Horák, J. Bulı́ř, Pavel Hubı́k, Zuzana Gedeonová, Ladislav Fekete, Morgane Poupon, J. Lančok
Topics & Concepts
X-ray photoelectron spectroscopyCrystallizationAmorphous solidPassivationMaterials scienceChemical engineeringDeposition (geology)RedoxHumidityDegradation (telecommunications)ChemistryCrystallographyNanotechnologyMetallurgyLayer (electronics)BiologyEngineeringSedimentThermodynamicsPhysicsTelecommunicationsPaleontologyComputer scienceMetal and Thin Film MechanicsSemiconductor materials and devicesZnO doping and properties