An AlGaN/GaN HEMT with sputter-SiN passivation for the on-state performance improvement
Cheng Yu, Guojian Ding, Qi Feng, Xiaohui Wang, Haojun Yang, Wenjun Xu, Peng Zuo, Junxian He, Yujian Zhang, Miao He, Yang Wang, Haiqiang Jia, Hong Chen
Topics & Concepts
PassivationHigh-electron-mobility transistorMaterials scienceOptoelectronicsPlasma-enhanced chemical vapor depositionSputter depositionSputteringLayer (electronics)Gallium nitrideNitrideCavity magnetronTransistorSiliconElectronic engineeringThin filmNanotechnologyElectrical engineeringVoltageEngineeringGaN-based semiconductor devices and materialsGa2O3 and related materialsSemiconductor materials and devices