Effect of sputtering power on the properties of SiO2 films grown by radio frequency magnetron sputtering at room temperature
Changjiang Zhao, Leran Zhao, Juncheng Liu, Zhigang Liu, Yan Chen
Topics & Concepts
Materials scienceSputteringTransmittanceAmorphous solidThin filmMolar absorptivitySputter depositionRefractive indexMicrostructureOpticsSurface roughnessFused quartzOptoelectronicsQuartzComposite materialAnalytical Chemistry (journal)NanotechnologyChemistryChromatographyPhysicsOrganic chemistrySurface Modification and SuperhydrophobicityZnO doping and propertiesThin-Film Transistor Technologies