Litcius/Paper detail

An advanced Bragg diffraction imaging technique to characterize defects: The examples of GaN and AlN

Thu Nhi Tran Caliste, Lutz Kirste, J. Baruchel

2023Microelectronic Engineering12 citationsDOI

Topics & Concepts

Materials scienceOpticsDiffractionDiffraction topographySynchrotron radiationCharacterization (materials science)Gallium nitrideBragg's lawSynchrotronImage resolutionX-ray crystallographyOptoelectronicsPhysicsNanotechnologyLayer (electronics)GaN-based semiconductor devices and materialsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devices
An advanced Bragg diffraction imaging technique to characterize defects: The examples of GaN and AlN | Litcius