Resistivity anisotropy of tilted columnar W and W Cu thin films
Raya El Beainou, Jean-Marc Cote, Vincent Tissot, V. Potin, Nicolas Martin
Topics & Concepts
Electrical resistivity and conductivityMaterials scienceSputteringAnisotropyThin filmCopperCondensed matter physicsComposite materialOpticsMetallurgyNanotechnologyElectrical engineeringEngineeringPhysicsCopper Interconnects and ReliabilityMagnetic properties of thin filmsPlasma Diagnostics and Applications