Low-cost microfluidic device micromachining and sequential integration with SAW sensor intended for biomedical applications
Serguei Stoukatch, Laurent A. Francis, F. Dupont, Michaël Kraft
Topics & Concepts
MicrofluidicsCleanroomPhotolithographyMaterials scienceRapid prototypingNanotechnologyFabricationSurface micromachiningMicrofabricationLab-on-a-chipProcess (computing)Computer sciencePathologyMedicineComposite materialOperating systemAlternative medicineMicrofluidic and Capillary Electrophoresis ApplicationsMicrofluidic and Bio-sensing TechnologiesNanofabrication and Lithography Techniques