A WO<sub>3</sub>-NPs/MEMS NH<sub>3</sub> Gas Sensor
Po Hsiang Wen, Hao Yuan Zheng, Ting‐Jen Hsueh
Abstract
This study exhibits WO 3 nanoparticles (NPs) by using ultrasonic wave grinding and fabricates a WO 3 –NPs/MEMS gas sensor. The experimental results show that the WO 3 – NPs/MEMS gas sensor responds better to NH 3 than to CO, CO 2 , and SO 2 . In terms of the stability and the reproducibility of the WO 3 –NPs/MEMS gas sensor, the average sensing response is about 16% and there is an inaccuracy of <±0.5% when the sensor is operated at 142 °C with 1.3 ppm NH 3 gas. The WO 3 –NPs sensor has a better sensing response to NH 3 than the WO 3 -thin film and original-WO 3 powder sensors. This study shows that WO 3 nanoparticles have a good sensing response to NH 3 gas.
Topics & Concepts
Microelectromechanical systemsMaterials scienceNanoparticleAnalytical Chemistry (journal)NanotechnologyChemical engineeringChemistryChromatographyEngineeringGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors