Chemical mechanical polishing on cobalt-based barrier through dual functionality of salicylhydroxamic acid between the removal of copper and corrosion inhibition
Yingqi Di, Guofeng Pan, Song Lv, Liunan She, Le Zhai, Yuhang Qi
Topics & Concepts
Salicylhydroxamic acidCopperCobaltChemical-mechanical planarizationCorrosionPolishingMetallurgyChemistryErosion corrosion of copper water tubesCorrosion inhibitorMaterials scienceBiochemistryEnzymeCorrosion Behavior and InhibitionMetal Extraction and BioleachingAdvanced Surface Polishing Techniques