Electrochemical seismometers based on sensitive elements with hourglass-shaped TGVs fabricated by femtosecond laser modification and wet etching
Zhenyu Sun, Maoqi Zhu, Xue Han, Yulan Lu, Jian Chen, Deyong Chen, Junbo Wang
Topics & Concepts
FemtosecondHourglassMaterials scienceEtching (microfabrication)LaserOpticsIsotropic etchingEngravingOptoelectronicsElectrochemistryGreen laserNanotechnologyComposite materialElectrodeChemistryPhysicsPhysical chemistryLayer (electronics)AstronomyLaser Material Processing TechniquesGeophysics and Sensor TechnologyAdvanced Surface Polishing Techniques