Roles and mechanistic analysis of adenine as a green inhibitor in chemical mechanical polishing
Nengyuan Zeng, Hongdong Zhao, Chong Luo, Yuling Liu, Chenwei Wang, Tengda Ma, Wantang Wang
Topics & Concepts
CorrosionTafel equationCopperX-ray photoelectron spectroscopyAdsorptionElectrochemistryScanning electron microscopeCorrosion inhibitorPolishingChemistryPolarization (electrochemistry)Chemical-mechanical planarizationMaterials scienceSlurryInorganic chemistryChemical engineeringMetallurgyElectrodeComposite materialPhysical chemistryEngineeringAdvanced Surface Polishing TechniquesCorrosion Behavior and InhibitionAdvanced Machining and Optimization Techniques