Enhanced response speed of SAW based hydrogen sensor employing a micro-heater
Baile Cui, Jing Jin, Lina Cheng, Xufeng Xue, Yong Liang, Wen Wang
Topics & Concepts
Materials scienceSurface acoustic waveWaferHydrogenHydrogen sensorAttenuationResponse timeHumidityOptoelectronicsSIGNAL (programming language)Operating temperatureAdsorptionSensitivity (control systems)AcousticsAnalytical Chemistry (journal)CatalysisElectrical engineeringOpticsElectronic engineeringChemistryComputer scienceThermodynamicsOrganic chemistryPhysicsBiochemistryComputer graphics (images)Programming languageChromatographyEngineeringPalladiumGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAcoustic Wave Resonator Technologies