Towards understanding the mechanism of vibration-assisted cutting of monocrystalline silicon by cyclic nanoindentation
Weihai Huang, Jiwang Yan
Topics & Concepts
NanoindentationBrittlenessMaterials scienceIndentationMonocrystalline siliconSiliconMicrostructureComposite materialDeformation (meteorology)Chip formationMetallurgyTool wearMachiningAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics