About the electrical characteristics and the process of making a nanocapacitor structure using (metal-insulator-carbon-metal nanotube layers).
Afshin Rashid
Abstract
Note: Nanosupercapacitors, also called electrochemical supercapacitors or nanocapacitors, thus emerge as promising fuel sources with astonishingly fast charge release rates. Amazing fast charging. Created to improve power execution (high speed capability), they still rely on similar inherent breakpoints.About the electrical characteristics and the process of making a nanocapacitor structure using (metal-insulator-carbon-metal nanotube layers). Due to the unique nanotube structure, this structure shows high capacitance and the possibility of extremely high integration density. Nanoscale patterns and high aspect ratio are obtained by electron beam lithography to fabricate these vertical nanostructures. This structure can be used to replace capacitors that use a silicon pillar structure in dynamic random access memory (DRAM) or as a nanoscale capacitor for various nanoelectronic devices.