High-Voltage Quasi-Vertical GaN Junction Barrier Schottky Diode With Fast Switching Characteristics
Feng Zhou, Weizong Xu, Fangfang Ren, Dong Zhou, Dunjun Chen, Rong Zhang, Youdou Zheng, Tinggang Zhu, Hai Lu
Abstract
In this letter, we report a quasi-vertical GaN junction barrier Schottky diode on low-cost sapphire substrate. With the high quality GaN epitaxy and selective-area p-islands formed via Magnesium ion implantation at the anode region, reverse leakage in level of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-7</sup> A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> was achieved, as well as a high on/off current ratio of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10</sup> and a high breakdown voltage of 838 V. Meanwhile, advantageous characteristics as expected in vertical GaN Schottky barrier diode were realized, including a low turn-on voltage of 0.5 V and fast switching performance under 400 V/10 A operation condition. Along with the improved heat dissipation via substrate thinning and packaging techniques, the diode retains a relatively low thermal resistance, enabling high current rectification level over 60 A, power efficiency up to 98.7 %, while maintaining low case temperatures.