Effect of peak current on the microstructure, mechanical properties and tribological behavior of MoxN coatings deposited by high power impulse magnetron sputtering
Xiaolong Lu, Xudong Sui, Jian Kang, Xiao Zhang, XingXu Miao, Junjie Wang, Junying Hao
Topics & Concepts
High-power impulse magnetron sputteringMicrostructureMaterials scienceCoatingTribologySputter depositionComposite materialCavity magnetronMetallurgyDirect currentSputteringThin filmNanotechnologyPower (physics)Quantum mechanicsPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchTribology and Wear Analysis