Energy distributions of the particles sputtered by gas cluster ions. Experiment and computer simulation
A.E. Ieshkin, A. V. Nazarov, A. A. Tatarintsev, Д.С. Киреев, A.D. Zavilgelsky, A. A. Shemukhin, V. S. Chernysh
Topics & Concepts
SputteringCluster (spacecraft)IonMaterials scienceAtomic physicsMolecular dynamicsMolybdenumThermalEnergy (signal processing)Yield (engineering)Thin filmPhysicsNanotechnologyThermodynamicsComposite materialMetallurgyProgramming languageQuantum mechanicsComputer scienceIon-surface interactions and analysisAdvanced Materials Characterization TechniquesDiamond and Carbon-based Materials Research