Strong piezoelectricity of the nm-thick flexible Hf0.5Zr0.5O2 ferroelectric film
Nannan Liu, Xinping Zhang, Yecheng Ding, Yaojin Wang, Xubing Lu, Guoliang Yuan, Jun‐Ming Liu
Topics & Concepts
PiezoelectricityFerroelectricityNanoelectromechanical systemsMaterials sciencePolarization (electrochemistry)Microelectromechanical systemsOptoelectronicsPiezoelectric coefficientNanometreNanotechnologyVoltageComposite materialElectrical engineeringChemistryNanoparticleNanomedicineDielectricEngineeringPhysical chemistryFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsMXene and MAX Phase Materials