Silicon wafer crack detection using nonlinear ultrasonic modulation induced by high repetition rate pulse laser
Jinho Jang, Peipei Liu, Byunggi Kim, Seung‐Woo Kim, Hoon Sohn
Topics & Concepts
Laser Doppler vibrometerMaterials scienceUltrasonic sensorLaserOpticsWaferAcousticsOptoelectronicsLaser power scalingPhysicsUltrasonics and Acoustic Wave PropagationNon-Destructive Testing TechniquesThermography and Photoacoustic Techniques