Fabrication of Si3N4/Cu direct-bonded heterogeneous interface assisted by laser irradiation
Yanyu Song, Duo Liu, Guobiao Jin, Haitao Zhu, Naibin Chen, Shengpeng Hu, Xiaoguo Song, Jian Cao
Topics & Concepts
Materials scienceCeramicMicroelectronicsLaserLayer (electronics)FabricationSubstrate (aquarium)Composite materialNanotechnologyOpticsOceanographyGeologyPhysicsPathologyMedicineAlternative medicineSemiconductor materials and devices3D IC and TSV technologiesAdvanced ceramic materials synthesis