Rapid homoepitaxial growth of (010) β-Ga2O3 thin films via mist chemical vapor deposition
Hiroyuki Nishinaka, Tatsuji Nagaoka, Yuki Kajita, Masahiro Yoshimoto
Topics & Concepts
MistChemical vapor depositionMaterials scienceThin filmCombustion chemical vapor depositionChemical engineeringDeposition (geology)Aqueous solutionEpitaxyNanotechnologyCarbon filmLayer (electronics)ChemistryOrganic chemistryBiologyMeteorologyPaleontologySedimentEngineeringPhysicsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques