High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser
Bing Dong, Zongwei Xu, Changkun Shi, Kun Zhang, Yuheng Zhang, Rushuai Hua, Wei Zhao, Jianshi Wang
Topics & Concepts
Materials scienceFemtosecondSilicon carbideOpticsPolarization (electrochemistry)LaserOptoelectronicsLaser beam qualitySiliconSurface micromachiningLinear polarizationComposite materialLaser beamsFabricationChemistryPhysical chemistryPathologyMedicineAlternative medicinePhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma