Modeling of abnormal grain growth in (111) oriented and nanotwinned copper
Andriy Gusak, Kuan‐Ju Chen, K. N. Tu, Chih Chen
Abstract
Uni-modal, not bi-modal, of abnormal grain growth has been observed in (111) oriented and nano-twinned Cu films. Because of the highly anisotropic microstructure, our kinetic analysis and calculation showed that it is the mobility which dominates the uni-modal growth, in which the lateral growth rate can be two orders of magnitude higher than the vertical growth rate. As a consequence, the abnormal grain growth has been converted from bi-modal to uni-modal.
Topics & Concepts
CopperGrain growthMetallurgyMaterials scienceComputer scienceGrain sizeMicrostructure and mechanical propertiesMetal and Thin Film MechanicsCopper Interconnects and Reliability