Effect of tungsten electrode crystallographic phases on the properties of HZO ferroelectric capacitor
Sangmin Lee, Minwoo Kim, Beomho Won, Junmo Kim, Suwan Lee, Hayoung Park, J. Lee, Seung‐Hyun Kim, Shahid Iqbal, Hyungtak Seo
Topics & Concepts
Materials scienceFerroelectricityTungstenCapacitorElectrodeCrystallographyOptoelectronicsMetallurgyVoltageDielectricElectrical engineeringPhysical chemistryChemistryEngineeringFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsAdvanced Memory and Neural Computing