Low-loss tantalum pentoxide photonics with a CMOS-compatible process
Zhaoting Geng, Weiren Cheng, Zhiwei Yan, Qiyuan Yi, Zhenyu Liu, Mingjian You, Xiaolun Yu, Pengzhuo Wu, Ning Ding, Xingyu Tang, Min Wang, Li Shen, Qiancheng Zhao
Abstract
We report a Ta 2 O 5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at 780 nm, and of 3.76 dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C-band for the first time to reveal the absorption loss of Ta 2 O 5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta 2 O 5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350°C, which is friendly to integration with active optoelectronic components.
Topics & Concepts
Materials scienceTantalum pentoxideFabricationOptoelectronicsWaveguideInsertion lossThermal stabilityOpticsPhotonicsTantalumAbsorption (acoustics)FinessePhotonic integrated circuitWavelengthDielectricFabry–Pérot interferometerMetallurgyComposite materialMedicinePhysicsAlternative medicinePathologyQuantum mechanicsPhotonic and Optical DevicesAdvanced Fiber Laser TechnologiesSemiconductor Lasers and Optical Devices