Sub-nanometer heating depth of atomic layer annealing
Wei-Hao Lee, Wei-Chung Kao, Yu‐Tung Yin, Sheng‐Han Yi, K.T. Huang, Hsin-Chih Lin, Miin‐Jang Chen
Topics & Concepts
Atomic layer depositionMaterials scienceAnnealing (glass)NanometreNanoscopic scaleFabricationCrystallinityDielectricNanotechnologyOptoelectronicsThin filmComposite materialPathologyAlternative medicineMedicineGaN-based semiconductor devices and materialsSemiconductor materials and devicesNanowire Synthesis and Applications