A critical study on different hydrogen plasma treatment methods of a-Si: H/c-Si interface for enhanced defect passivation
Anishkumar Soman, Aldrin Antony
Topics & Concepts
Dangling bondPassivationMaterials sciencePlasma-enhanced chemical vapor depositionHydrogenSiliconHeterojunctionCarrier lifetimeEpitaxyWaferSolar cellDiffusionAnalytical Chemistry (journal)OptoelectronicsNanotechnologyChemistryChromatographyPhysicsLayer (electronics)ThermodynamicsOrganic chemistrySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence