Identification of Burgers vectors of dislocations in monoclinic β-Ga2O3 via synchrotron x-ray topography
Yongzhao Yao, Yoshihiro Sugawara, Yukari Ishikawa
Abstract
Dislocations are major structural defects in semiconductor materials, and they have negative impacts on the performance and reliability of electronic devices. The Burgers vector (b→) of a dislocation is one of the most important characteristics that determines its behavior in an operating device. In this study, we used synchrotron x-ray topography (XRT) to perform systematic observations of dislocations in β-Ga2O3, which is a promising wide-bandgap semiconductor for power device applications. By applying the g→⋅b→ invisibility criterion to dislocation contrasts in XRTs taken at multiple reciprocal lattice vectors g→, we identified 12 types of Burgers vectors, including 11 types theoretically predicted by Yamaguchi et al. [Superlattice Microst. 99, 99 (2016)] and b→=⟨100⟩. Some of these Burgers vectors, such as b→=⟨101¯⟩,12⟨132⟩,12⟨13¯2⟩,⟨001⟩, and ⟨100⟩, were confirmed experimentally for the first time.