Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
Jiqiang Wang, Yongda Yan, Bosen Jia, Yanquan Geng
Topics & Concepts
Materials scienceTransmission electron microscopyNanostructureAtomic force microscopyStackingNanotechnologyComposite materialOptoelectronicsPhysicsNuclear magnetic resonanceForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis