A review of Al2O3 as surface passivation material with relevant process technologies on c-Si solar cell
Sudipta Banerjee, Mukul K. Das
Topics & Concepts
PassivationMaterials scienceAtomic layer depositionPlasma-enhanced chemical vapor depositionSolar cellDeposition (geology)SiliconAluminiumAluminum oxideAluminium oxideSputteringCarrier lifetimeNanotechnologyOptoelectronicsThin filmLayer (electronics)MetallurgySedimentBiologyPaleontologySilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisThin-Film Transistor Technologies