Structural and mechanical properties of AlTiTaZr( N) medium entropy films (MEF) obtained by DC magnetron sputtering in dynamic mode
Mohamed El Garah, Sofiane Achache, Alexandre Michau, Frédéric Schuster, Frédéric Sanchette
Topics & Concepts
Materials scienceSputter depositionAmorphous solidSapphireArgonNitrogenSputteringAnalytical Chemistry (journal)Composite materialCrystallographyThin filmOpticsNanotechnologyChemistryLaserPhysicsOrganic chemistryChromatographyHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics