Hybrid diffractive-refractive lens for chromatic confocal measurement system
Y J Wang, Jie Li, Xi Hou, Lin Chen, Xin Liu, Jie Yang, Yidi Zheng
Abstract
A novel chromatic confocal measurement (CCM) method using a hybrid diffractive- refractive lens is presented. This hybrid diffractive- refractive lens is designed to optimize the linearity of chromatic dispersion and minimize the size of the optical system. The hybrid diffractive- refractive lens is fabricated by etching a diffractive surface onto a quartz aspheric lens through lithography, which combines the high numerical aperture (NA) of a refractive lens with the unique dispersion properties of the diffractive optical elements (DOE). The lens is incorporated as a dispersive objective lens in a CCM experimental system. The system has a measurement range of 514.8 µm, calibrated using a laser displacement interferometer. The experimental results show that the wavelength-to-axial position coding of the CCM system achieves high linearity (R 2 = 0.9999) in the working wavelength range (500-700 nm). The system has an axial resolution of 0.08 µm and a displacement measurement nonlinear error of less than 2.05 µm.